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◆◇◆ Small Vertical Experimental Furnace for R&D TVF-110 ◆◇◆

Low-cost minimum necessary configuration (manual control) applicable as tubular furnace, diffusion furnace, and thermal CVD.

Manual lift vertical experimental furnace for small substrates from small samples to 3-inch wafers. A low-cost version of a vertical furnace ideal for basic experiments in university and corporate research labs. 【Applications】 ◉ Heat treatment for semiconductors, solar cells, fuel cells, electronic substrates, etc. ◉ Basic experiments: simple heat treatment experiments such as vertical tubular furnaces, oxidation diffusion furnaces, LPCVD, etc.

Thermosera Japan_Small Experimental Vertical Furnace TVF-110

basic information

**Main Specifications** - Maximum furnace temperature: 1200℃, maximum sample temperature: 950℃ - Small sample size: from a few millimeters to 3-inch wafer size - Number of substrates: approximately 1 to 3 - Manual lift quartz susceptor: with stop position scale and clamp - Furnace core tube: Φ100 x Φ95 x 470L mm - Lifting: manual rotating handle - Temperature control: PID programmable temperature controller - Thermocouples: 2 pairs of K-type thermocouples x1 (for control and over-temperature), K-type bare wire (for furnace core temperature measurement)

Price information

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Delivery Time

Model number/Brand name

TVF-110

Applications/Examples of results

◉ Heat treatment of semiconductors, solar cells, fuel cells, electronic substrates, etc. ◉ Basic experiments: simple heat treatment experiments using vertical tubular furnaces, oxidation diffusion furnaces, LPCVD, etc.

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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.