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Sputtering and deposition source composite thin film deposition device [nanoPVD-ST15A]

Sputter Cathode and Co-evaporation Source Mixed Thin Film Experimental Device: Metal deposition, organic deposition, and sputter cathode installed in a compact frame.

Three types of film formation components are installed in the chamber: resistance heating evaporation source (metal evaporation), organic evaporation source (organic materials), and magnetron sputtering (metal and insulating materials), allowing for various thin film experimental setups to be accommodated within a single chamber. ◉ Three combinations are available: 1. Sputter cathode + resistance heating evaporation source x2 2. Sputter cathode + organic evaporation source x2 3. Sputter cathode + resistance heating source x1 + organic evaporation source x1 (*DC sputtering only) - Evaporation range: Φ4 inch / Φ100 mm - Vacuum exhaust system: Turbo molecular pump + auxiliary pump (rotary or dry scroll pump) - Substrate rotation and vertical lifting stage - Max 500℃ substrate heating heater - Quartz oscillator film thickness sensor - 7” touch panel HMI operation (includes 'IntelliLink' Windows PC remote monitoring software)

basic information

【Specifications】 ◉ Compatible substrate: up to Φ4 inch ◉ Sputtering: 2" cathode x up to 3 sources ◉ Vacuum deposition: resistance heating deposition (up to 2), organic material deposition (up to 4) ◉ 7" touch panel for easy operation with PLC automatic process control ◉ APC automatic pressure control ◉ High precision process control with MFC ◉ 1 line of Ar gas (standard) + up to 3 additional lines for N2, O2 ◉ USB port for connection to Windows PC, allowing creation and storage of recipes for up to 1000 layers and 50 films. Data logging on PC ◉ Various other options available ◉ 7" touch panel for easy operation with PLC automatic process control

Price information

For more details, please contact our company.

Delivery Time

Please contact us for details

Delivery dates may vary depending on specifications; please contact us for more information.

Model number/Brand name

nanoPVD-ST15A

Applications/Examples of results

Various electronic device thin film experiments Compatible with metal films, insulating films, compound films, and many other applications.

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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.