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MiniLab-026/090 Glove Box Thin Film Experiment Device

Compact and space-saving! Ideal for organic thin film development, all processes such as deposition, sputtering, and annealing can be seamlessly performed within the glove box.

In the film formation process of 2D materials such as OLED (Organic EL), OPV (Organic Photovoltaic), OTFT (Organic Thin Film Transistor), graphene, and TMD (Transition Metal Dichalcogenides), it is necessary to handle samples in an inert gas atmosphere isolated from oxygen and moisture. The MiniLab-026/090-GB achieves a "oxygen and moisture-free" experimental environment for organic film applications by housing the PVD chamber within the GB, creating a compact and space-saving environment. 【Features】 ◉ A series of processes such as PVD film formation, spin coating, and hot plate baking can be performed seamlessly within the GB without exposing them to the outside air. ◉ Space-saving: The chamber does not protrude from the back, so it does not take up space. 【MiniLab Models】 ◉ MiniLab-026 (26ℓ volume): Metal/insulator/organic material deposition, sputtering, plasma etching, annealing ◉ MiniLab-090 (90ℓ volume): Metal/insulator/organic material deposition, EB deposition, sputtering, plasma etching, annealing * Please first contact us with your required specifications, and we will configure the system according to your needs.

Thermosera Japan_MiniLab-026/090-GB Thin Film Experiment Equipment Listing Page

basic information

【GB Compatible MiniLab-026/090 Main Specifications】 ◉ Substrate Size: Maximum Φ6" (026), Maximum Φ10" (090) ◉ Chamber: Made of SUS304, UHV compatible (*090 features a sliding door type, with a maintenance door at the back) ◉ 19-inch control rack stored under the workbench ◉ ML Chamber Internal Film Deposition Module: - Resistance heating evaporation source (up to 4 sources) - Organic evaporation source (up to 4 sources) - Φ2" Magnetron cathodes (up to 3 units) - Plasma etching - Substrate heating stage, etc. ◉ High precision film thickness control ◉ Turbo molecular pump + rotary pump (dry scroll pump option) ◉ Other abundant options *For other detailed specifications, please contact us.

Price range

Delivery Time

Model number/Brand name

MiniLab-026/090-GB

Applications/Examples of results

OLED (Organic Electroluminescent) OPV (Organic Photovoltaic) OTFT (Organic Thin-Film Transistor) Graphene 2D Materials (Two-dimensional layered inorganic nanomaterials such as transition metal dichalcogenides) Others

Detailed information

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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.