◆OLED◆ Organic vapor deposition - high-temperature metal deposition cell Max 1500℃
It is a high-performance vacuum deposition source that can be used as a high-temperature heating cell for vacuum applications, with an organic deposition source up to 800°C and a metal deposition source up to 1500°C.
The OLED evaporation source is a high-temperature deposition source for vacuum deposition with a maximum operating temperature of 1500°C. By simply replacing the body without removing the fixed base, you can switch between cells for low-temperature organic deposition (up to 800°C) such as OLEDs and high-temperature heating (up to 1500°C) cells. If used as a source for vacuum film formation, a shutter actuator is also provided. When used as a high-temperature heater above 800°C, it features an internal shield structure designed with insulation and thermal shielding in mind. The shutter adopts a flip type. Even if multiple OLED sources are installed in the chamber, they will not interfere with other components. The crucible can be removed simply by taking off the upper cap, making the material filling and replenishment process hassle-free. The main body is available for 1cc crucibles (maximum filling amount 1.5cc) and 10cc crucibles (maximum filling amount 15cc), and can be exchanged by replacing the main body with the base without removing the fixed base from the chamber. Thermocouples can be specified as either K or C types. Crucibles can be selected from alumina (standard), quartz, PBN, and carbon.
basic information
【Main Specifications】 ■ Maximum Control Temperature: 800℃ or 1500℃ ■ Operating Environment: In vacuum or inert gas (*O2 up to 800℃) ■ Heater: Tungsten filament ■ Crucible Volume: 1cc (maximum fill volume 1.5cc) ■ Crucible Material: Alumina (standard) ■ Case Material: SUS304 or Molybdenum ■ Thermocouple: Type K or Type C 【Options】 ⚫︎ Crucible Material: PBN, Graphite, Quartz ⚫︎ Heater: NiCr wire, Kanthal wire (*for O2) ⚫︎ Crucible Volume: 10cc (maximum fill volume 15cc) ⚫︎ Shutter: Pneumatic or motor-driven ⚫︎ Water Cooling Jacket ⚫︎ Controller (Heater and Shutter Control Box)
Price information
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Model number/Brand name
◆OLED◆ Organic deposition - high-temperature metal evaporation source Max 1500℃
Applications/Examples of results
High vacuum crucible heating heater, organic material deposition source for vacuum deposition, high-temperature evaporation metal deposition source, etc.
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◆OLED◆ Organic vapor deposition - High-temperature metal evaporation source Max 1500℃
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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.