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[Analysis Case] Distortion Analysis in the Field of Element Separation

NBD: Strain analysis of micro-regions using Nano Beam Diffraction.

The NBD method allows us to gain insights into lattice strain from the changes in the diffraction angle of the electron beam (positions of electron diffraction spots) within the sample. Measurements can be conducted in any arbitrary crystal axis incident direction, tailored to the device pattern. Results measured on the Si substrate in the element separation region (around LOCOS) confirmed that the strain varies depending on the heat treatment temperature and crystal orientation.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/17…

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For detailed data, please refer to the catalog.

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Applications/Examples of results

Analysis of LSI and memory.

[Analysis Case] Distortion Analysis of the Element Separation Area_C0016

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