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[TDS] Thermal Desorption Gas Analysis Method

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[TDS] Thermal Desorption Gas Analysis Method

A mass spectrometry method that allows monitoring of gases generated by vacuum heating/warming at different temperatures, with high sensitivity for detecting hydrogen and water.

TDS is a mass spectrometry method that allows monitoring of gases generated by vacuum heating/ramping at different temperatures. The TDS spectrum represents temperature on the horizontal axis and ion intensity on the vertical axis. This enables comparison of the amount of gas released and the desorption temperatures. Additionally, due to the vacuum environment, hydrogen and water can be analyzed with high sensitivity. - It is possible to understand the relationship between the gases desorbed from the sample, the pressure, and the temperature at which they are generated. - Since only the sample can be heated, the background is low, allowing for high-sensitivity analysis of low-mass molecules such as hydrogen, water, oxygen, and nitrogen. - It is possible to estimate the composition of the gases generated from the sample and perform quantitative analysis (counting the number of molecules).

Related Link - https://www.mst.or.jp/method/tabid/136/Default.asp…

basic information

■Heating Section The sample is placed on the stage and heated by irradiating infrared light from below the stage. Temperature control is performed using a thermocouple located on the stage side. It is also possible to measure the temperature on the surface side of the sample using a thermocouple on the upper side of the sample. ■Mass Analysis Section The gas generated by heating is ionized into positive ions due to collisions with accelerated electrons and is separated according to its mass-to-charge ratio.

Price information

The price varies depending on the measurement target, so please feel free to contact us.

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Applications/Examples of results

- Moisture management of interlayer dielectric films - Desorption of H2 - Confirmation of dry etching residues - Evaluation of wafer surface contamination, etc.

Detailed information

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