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Ar ion milling processing

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Ar ion milling processing

This is a processing method for producing thin film samples for transmission electron microscopy with a thickness of less than 50 nm by performing mechanical polishing followed by finishing with a low-energy Ar ion beam.

The Ar ion milling method is a processing technique used to create thin film samples for transmission electron microscopy with a thickness of less than 50 nm by performing mechanical polishing followed by finishing with a low-energy Ar ion beam.

Related Link - https://www.mst.or.jp/method/tabid/173/Default.asp…

basic information

1. Bonding The samples are bonded together with adhesive or bonded to the support substrate. 2. Cutting Cut out with a thickness of a few millimeters. 3. Polishing Perform mechanical polishing to thin the material so that the bonding interface is centered. 4. Ar Ion Milling Irradiate with low-energy Ar ions to achieve thinning.

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Applications/Examples of results

- Thickness evaluation of thin films on substrates (cross-sectional TEM observation) - Evaluation of crystal grains in thin films on substrates (plan-view TEM observation)

Detailed information

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Ar Ion Milling Process_B0203

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