Detection of trace components by P&T of volatile organic compounds (VOCs)
GC/MS: Gas Chromatography-Mass Spectrometry
Volatile organic compounds (VOCs) are used during the cleaning of semiconductors and industrial products and may be present in trace amounts in cleaning water, etc. VOCs in water are a concern because even in trace amounts, they can cause odors and health issues. Therefore, environmental standards and discharge standards have been established, and methods capable of measuring low concentrations are required. This case presents an example of detecting trace VOC components (sub-ppb level) in water by introducing components concentrated by P&T (Purge & Trap) into GC/MS.
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Applications/Examples of results
Analysis of LSI, memory, electronic components, manufacturing equipment, parts, cosmetics, daily necessities, food, and the environment.