一般財団法人材料科学技術振興財団　MST Official site

Contact Us

[Analysis Case] Evaluation of Composition Distribution of Ultra-Thin Films Using Angle-Resolved XPS (ARXPS)

C0550_角度分解XPS（ARXPS）.jpg

[Analysis Case] Evaluation of Composition Distribution of Ultra-Thin Films Using Angle-Resolved XPS (ARXPS)

C0550_角度分解XPS（ARXPS）.jpg
C0550_角度分解XPS（ARXPS）.jpg

It is possible to evaluate the depth profile of ultra-thin films on the substrate.

Angle-resolved X-ray photoelectron spectroscopy (ARXPS) is a technique that detects photoelectrons emitted by X-ray irradiation at different take-off angles, using spectra with varying detection depths to evaluate the depth profile near the sample surface. Compared to traditional methods using Ar ion sputtering, it offers improved depth resolution and advantages such as the absence of compositional changes due to selective sputtering or mixing, making it effective for evaluating the depth profiles of ultra-thin films (on the order of a few nanometers) on substrates. This document presents a case study on the evaluation of compositional distribution within a SiN film on a Si substrate.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/48…

basic information

For detailed data, please refer to the catalog.

Price information

-

Delivery Time

Applications/Examples of results

Analysis of LSI and memory.

catalog（1）

Download All Catalogs

[Analysis Case] Evaluation of Composition Distribution of Ultra-Thin Films by Angle-Resolved XPS (ARXPS) _C0550

TECHNICAL

Contact this catalog

Recommended products

  • 【測定法】計算科学・AI・データ解析

[Analysis Case] Competitive Adsorption Analysis of SMI and TMA on Cu_C0743

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of Surface Components of Fur

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Contamination Analysis in Vacuum Equipment

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Investigation of Foreign Object Occurrence: Analysis of the Tube

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: Failure Analysis

[Analysis Case] Internal Structure Evaluation of Battery Components Using Nano-CT

一般財団法人材料科学技術振興財団　MST

  • 【測定法】計算科学・AI・データ解析

[Analysis Case] Vapor Pressure Calculation of Ga-containing Precursor by Molecular Dynamics Simulation

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Evaluation of Bacterial Count by Real-Time PCR Method

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Depth Direction State Evaluation of Tin (Sn) Surface

一般財団法人材料科学技術振興財団　MST

  • 【分析事例】高分子材料

[Analysis Case] CO2 Adsorption Simulation on MOF using GCMC Method

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] HF Etching Simulation of a-SiO2 Film

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Presentation] Surface analysis applicable in various fields! TOF-SIMS Analysis Case Studies

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Solar Cells

Analysis Case: Analysis of Defect Levels in Gallium Nitride

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Optical Devices

[Analysis Case] Investigation of Product Deterioration through Weather Resistance Testing

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Display

Analysis case: Assignment of the Raman spectrum of copper phthalocyanine.

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Imaging of Lipids

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Evaluation of Hierarchical Structure of Polymer Materials Using X-ray Diffraction and Scattering Techniques

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Cosmetics

[Analysis Case] Calculation of Acid Dissociation Constant (pKa) Using Quantum Chemistry Calculations

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Evaluation of Molecular Permeability to Lipid Bilayers through Molecular Dynamics Calculations

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Solar Cells

[Analysis Case] Analysis of Thermal Decomposition Reactions of Ionic Liquids through Quantum Chemical Calculations

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] Evaluation of Binding States in Secondary Battery Cathodes

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Display

[Analysis Case] Metal Analysis in Organic Materials

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Observation of Structural Changes in ABS Resin through Tensile Testing

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] Energy Profile of Li Ion Insertion/Extraction Process

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Structural Analysis of End Groups of Polycarbonate

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Cosmetics

[Analysis Case] NMR Chemical Shift Simulation of Organic Molecules

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Oil Analysis (GC/MS Edition)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Fine Structure of Hair Cross-Section (S)TEM Analysis

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Cosmetics

[Analysis Case] (S)TEM Observation by Negative Staining

一般財団法人材料科学技術振興財団　MST

  • Analysis Case: Daily Necessities

[Analysis Case] (S)TEM Observation of Polymer Materials Using Electronic Staining

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Precursor Adsorption Simulation in ALD Film Formation

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Evaluation of Crystallinity of Carbon Materials Using Raman Mapping

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Evaluation of Composition Distribution of Organic Films by Raman Mapping

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Imaging of the Cuticle

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Dynamic Viscoelastic Evaluation of PDMS using AFM

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Evaluation of DC Voltage Dependence of Carriers in Semiconductors

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] Structural Evaluation of Lithium-Ion Secondary Battery Anode Materials

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Three-Dimensional Structural Analysis of 3D Printed Objects

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Biotechnology

[Analysis Case] Evaluation of Mechanical Properties of Hair Cross-Sections Prepared by Microtome Method

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Secondary Battery

[Analysis Case] Local Area Evaluation of Positive Electrode Active Material in Secondary Batteries (C0614)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Fuel Cell

[Analysis Case] Particle Size Analysis of Au Nanoparticles Using X-ray Small Angle Scattering Method

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Manufacturing Equipment and Components

[Analysis Case] Evaluation of Stainless Steel Passive Films Compliant with SEMI Standards

一般財団法人材料科学技術振興財団　MST

  • Analysis Case: Daily Necessities

[Analysis Case] Identification Analysis of Pigments by Direct MS Method (C0611)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] SEM Observation of Wide-Area Cross-Section Using Xe-PFIB

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Theoretical Calculation of Fe/MgO/Fe Junction System (C0583)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Electronic Components

[Analysis Case] Composite Analysis of Specific Areas within Electronic Devices (C0572)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] LSI・Memory

[Analysis Case] Evaluation of Composition Distribution of Ultrathin Films by ARXPS (C0550)

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Food

[Analysis Case] Quantitative Analysis of Glucosylceramide in Konjac

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Fuel Cell

[Analysis Case] Evaluation of the Chemical State of RuO2 Catalyst by in-situ XAFS

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Display

[Analysis Case] NMR - Spectrum Separation of Mixed Samples Using DOSY Method

一般財団法人材料科学技術振興財団　MST

Distributors

一般財団法人材料科学技術振興財団　MST
一般財団法人材料科学技術振興財団　MST
Official site
Phone number/address

MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

Product/Service List (789)