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[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM

C0543_SEMとSIMによるCu表面.jpg

[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM

C0543_SEMとSIMによるCu表面.jpg
C0543_SEMとSIMによるCu表面.jpg

It is effective to differentiate between the two methods depending on the surface structure of interest.

Scanning Electron Microscopy (SEM) and Scanning Ion Microscopy (SIM) are both techniques used to evaluate the structure near the surface of a sample by obtaining secondary electron images. Differences in the primary probes lead to variations in contrast and spatial resolution, making it effective to choose between the two methods depending on the surface structure of interest. This document summarizes the comparison of the two methods and presents an example of measurements observing a Cu surface.

Related Link - https://www.mst.or.jp/casestudy/tabid/1318/pdid/49…

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Analysis of LSI and memory.

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[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM_C0543

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