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[IP Method] Ar Ion Polishing Processing

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[IP Method] Ar Ion Polishing Processing

The IP method is a type of polishing technique that uses ion beams for processing.

The IP method is a technique that utilizes the sputtering phenomenon, where sample atoms are ejected from the sample surface when an ion beam with aligned energy and direction is irradiated onto the sample. The ion species used is typically a noble gas (Ar in MST) that does not pose concerns about chemical reactions with the sample. In the AES analysis of the processed surface, the components of the shielding plate (Ni, P) were below the detection limit.

Related Link - https://www.mst.or.jp/method/tabid/176/Default.asp…

basic information

After IP processing of the card edge connector, we conducted reflection electron image observation. We performed reflection electron image observation on cross-sections prepared by the IP method and mechanical polishing method. In the IP method, the Cu crystal grains were clearly observed, and there were no polishing scratches.

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Applications/Examples of results

It is suitable for the preparation of samples for the following observations and analyses: - Cross-sectional observation of laminated films with different hardness - Cross-sectional observation of films where delamination occurs at the interface - Observation of crystal grains (EBSD) - FIB processing (for TEM observation) and AES analysis

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