◆HTE Heater◆ High Vacuum Crucible Heating Heater Max 1500℃
High-temperature crucible heating heater for vacuum use. A versatile heater unit that can be used as an organic deposition source at 800°C and a metal deposition source at 1500°C.
The HTE heater is a super high-temperature vacuum heating heater unit with a maximum operating temperature of 1500°C. It can be used with materials that have high evaporation temperatures, making it suitable for various applications such as low-temperature organic deposition (up to 800°C) and high-temperature resistance heating deposition (up to 1500°C) for vacuum deposition film formation. If used as a deposition source for vacuum film formation, shutters and actuators can also be added. When used as a high-temperature heater above 800°C, it features an internal shield structure designed with insulation and thermal shielding in mind. The shutter adopts a flip type, allowing multiple deposition sources to be installed in the chamber without interfering with other components. The crucible can be easily removed by simply taking off the upper cap, making the filling and replenishing of materials hassle-free. The main body is available for 1cc crucibles (maximum filling capacity of 1.5cc) and 10cc crucibles (maximum filling capacity of 15cc), and it can be replaced by swapping the main body with the base without removing the fixed base from the chamber. Two types of thermocouples, K type and C type, can be specified. Crucibles made of alumina (standard), quartz, PBN, and carbon are available for selection.
basic information
【Main Specifications】 ■ Maximum Control Temperature: 800℃ or 1500℃ ■ Operating Environment: In vacuum or inert gas (*O2 up to 800℃) ■ Heater: Tungsten filament ■ Crucible Volume: 1cc (maximum fill amount 1.5cc) ■ Crucible Material: Alumina (standard) ■ Case Material: SUS304 or Molybdenum ■ Thermocouple: Type K or Type C 【Options】 ⚫ Crucible Material: PBN, Graphite, Quartz ⚫ Heater: NiCr wire, Kanthal wire ⚫ Crucible Volume: 10cc (maximum fill amount 15cc) ⚫ Shutter: Pneumatic or Motor-driven ⚫ Water Cooling Jacket ⚫ Controller (Heater and Shutter Control Box)
Price information
Please contact us.
Delivery Time
Model number/Brand name
HTE Heater Max 1500℃
Applications/Examples of results
High vacuum crucible heating heater, vacuum deposition organic material deposition source, high-temperature evaporation metal deposition source, etc.
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【Endless possibility_thermal engineering...】 Our company sells vacuum thin film devices for semiconductor and electronic device fundamental research, ultra-high temperature heaters for CVD substrate heating, experimental furnaces, temperature measurement equipment, and more. To meet the endless demand for "heat," which is indispensable in any era, and to respond to various requests in the field of fundamental technology development, we aim to introduce the latest equipment and contribute to research and development in Japan.