[Analysis Case] Evaluation Case of Hydrogen Injection Sample using SRA/SIMS
Introduction to Case Studies on Carrier Concentration Analysis in Lifetime Control Samples
In power semiconductor devices, crystal defects may be formed within the Si substrate for lifetime control. This presents a case study evaluating the carrier concentration distribution due to differences in thermal treatment conditions of hydrogen ions, one of the elements used to create the lifetime control region.
basic information
For detailed data, please refer to the catalog.
Price information
-
Delivery Time
Applications/Examples of results
Analysis of power devices.