一般財団法人材料科学技術振興財団　MST Official site

Contact Us

[Analysis Case] Evaluation of Depth Profile Concentration Distribution of Alkali Metals in SiO2 by GCIB

C0234.png

[Analysis Case] Evaluation of Depth Profile Concentration Distribution of Alkali Metals in SiO2 by GCIB

C0234.png
C0234.png

Evaluation of impurities in SiO2 films

Alkali metals such as Li, Na, and K are key elements that cause various failures in semiconductors. These are referred to as mobile ions that can move within the film during measurement, making it difficult to obtain an accurate distribution. In this study, by conducting depth-direction analysis using a GCIB (Ar cluster) with a sputter ion source in TOF-SIMS, it was found that the movement of alkali metals can be suppressed even at room temperature compared to oxygen sputter guns. This measurement allows for qualitative and quantitative analysis of impurities within SiO2 films. Measurement method: TOF-SIMS Product fields: LSI, memory, electronic components Analysis purpose: Trace concentration evaluation For more details, please download the materials or contact us.

MST Homepage

basic information

For more details, please download the materials or contact us.

Price range

Delivery Time

Applications/Examples of results

Analysis of LSI, memory, and electronic components.

catalog（1）

Download All Catalogs

[Analysis Case] Evaluation of Depth Profile Concentration Distribution of Alkali Metals in SiO2 Using GCIB_C0234

PRODUCT

Contact this catalog

Recommended products

  • [Analysis Case] LSI・Memory

[Analysis Case] Composition Analysis of Particles on a Wafer

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Qualitative Analysis of Fluorinated Gases

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: Failure Analysis

Observation of structural changes in metallic materials through tensile testing using in situ X-ray CT.

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: Failure Analysis

[Analysis Case] Evaluation of Metal Impurities in the Metal Film and Interface of the Device

一般財団法人材料科学技術振興財団　MST

  • [Analysis Case] Fuel Cell

Accelerating research and development, [new] surface analysis service launched!

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Imaging of Brain Lipids

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Emission Analysis of Perovskite Solar Cells

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

Quantification of cellulose, hemicellulose, and lignin in wood biomass.

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Depth Direction Analysis of Components in SiON Ultra-Thin Films

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Mechanical Property Evaluation Simulation Using Molecular Dynamics Calculations

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Analysis of Bacteria Using DNA Analysis

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Outgassing Analysis of Resin for 3D Printers

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Impurity Evaluation of MLCC Using Diagonal Processing MLCC

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Comprehensive Evaluation of Positive Electrode Active Materials in Secondary Batteries

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Structural Evaluation of Secondary Battery Separators

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Evaluation of Sn Surface State by XPS

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] XPS Analysis of Metal Pipe Inner Wall Using Combined Cutting Processing

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Wide-area Quantitative Mapping using XPS

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Component Analysis of Disinfectant Alcohol

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Imaging Analysis of Antimicrobial Agents on Antimicrobial Coating Surfaces

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Structural Analysis of Non-Woven Fabric Masks

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of the Composition of Secondary Battery Electrolyte

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Component Evaluation of Positive and Negative Electrode Binders in Secondary Batteries

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Binding State Mapping by XPS

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Analysis of All-Solid-State Batteries

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

Analysis of Corrosive Gases Emitted from Resin

一般財団法人材料科学技術振興財団　MST

  • Vibrational spectroscopy

[Analysis Case] Evaluation of Curing Degree of UV-Cured Resin by FT-IR

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Qualitative and Structural Analysis of Resin (Synthetic Polymer)

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Rietveld Analysis of Secondary Battery Cathode Materials

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Composition Analysis of the Surface Film on the Positive Electrode of Secondary Batteries

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Investigation of the Causes of Yellowing in Polyurethane

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Analysis of LIB Electrolyte Using Molecular Dynamics Simulation

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of Glass Fiber Reinforced Plastic using X-ray CT and GC/MS

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Simulation of Impurity Diffusion in Silicon Crystals

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Composition Analysis of UV Curing Resin

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Evaluation of the Imidization Reaction of Polyimide

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Other Measurement Methods

[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Structural Refinement of Powdered Crystalline Materials Using Rietveld Analysis Method

一般財団法人材料科学技術振興財団　MST

  • [Measurement Method] Electron Microscopy Observation and Analysis

[Analysis Case] STEM, EBSD Image Simulation for Polycrystalline Structure Analysis

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] CFRP (Carbon Fiber Reinforced Plastic) Internal Fiber Orientation Analysis

一般財団法人材料科学技術振興財団　MST

  • Measurement Method: X-ray Diffraction Related

[Analysis Case] Measurement of Partial Density of States of GaN

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Structural Analysis of Tape Adhesives by GC-MS

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of the Component 18-MEA on Hair Surface

一般財団法人材料科学技術振興財団　MST

  • Mass spectrometry

[Analysis Case] Evaluation of Component Distribution in Skin Cross-Section

一般財団法人材料科学技術振興財団　MST

Distributors