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[FIB-MS] Focused Ion Beam Mass Spectrometry

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[FIB-MS] Focused Ion Beam Mass Spectrometry

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This is a method that allows simultaneous shape observation and elemental imaging of small areas using a FIB and a TOF mass spectrometer mounted on an SEM device.

? Surface analysis of solid materials is possible ? Light elements such as Li, which are difficult to evaluate with EDX, can be assessed ? By using Ga ions as primary ions, evaluation can be performed with high surface resolution (on the order of tens of nm) ? The detection limit is as low as a few ppm (depending on the element), making it suitable for trace impurity element analysis compared to EDX ? Measurements can be conducted without atmospheric exposure by using a dedicated holder ? Since it is mounted on a SEM device, morphological observation and elemental analysis can be performed within the same chamber

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Applications/Examples of results

- Visualization of elemental distribution through surface analysis (approximately a few micrometers to 200 micrometers in size) - Evaluation of the distribution of H, Li, and F in electrodes of lithium-ion secondary batteries, and assessment of degradation - Composition analysis of foreign substances on the submicron order

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